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Tools that you may need to be trained on (Project-Dependent)

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  • SEM (NEON 40)

  • SEM (Gemini 460, the newer SEM)

  • CHA 1 (for metals)

  • CHA 2 (for dielectrics)

  • KJL e-Beam Evaporator (has largely replaced CHA #1 for our group)

  • Bruker Dektak XT

  • Atomic Force Microscope (digital instruments #2 in LabAccess)

  • Oxford 80 RIE

  • Oxford 100 ICP

  • AJA Ion Mill

  • Plasmatherm Deep Silicon RIE

  • Plasmatherm #2 RIE

  • Plasmatherm #1 PECVDPlasmatherm #2 RIE

  • Fiji ALD

  • ALD Banerjee

  • MJB4 or MA8 (or both)

  • AML Wafer Bonder

  • Raith (Old)

  • Raith (New)

  • JEOL

  • JJ Woolam Ellipsometer

  • JJ Woolam IR VASE Mid-Infrared Ellipsometer (to be installed)

  • XRD (if you are a grower)