Vega-3 SEM

Vega-3 SEM

This collection of pages is meant to contain information related to the scanning electron microscope setup. This includes contact information for Vega technicians, procedures for repairs we can do ourselves, and proper operating procedures for the SEM.

 

Lifetime/Service Info:

  • Average filament lifetime is ~300 hours.

  • Turbo-molecular pump should be serviced after ~1400 days

 

Misalignment Issues (Absorption current <1pA, bad imaging) 

Autoalign Gun Centering

 

Manually center column (wobble)

 

 

 

 

 

Tescan Service Questions Contact (as of 2/20/2024) 

Clifford DeLozier

Sr Field Service Engineer

p: +1 702 813 8829

a: TESCAN USA, Inc.

w: www.tescan.com | e: clifford.delozier@tescan.com