This is meant to serve as a list of the most essential cleanroom equipment to be trained on, as a reference for new students. However, this is not a comprehensive list of equipment we use or need to be trained on.
A list of all tools in the cleanroom can be found at https://mrc.utexas.edu/facilities
For training, send requests to mertrain@mer.utexas.edu (See https://mrc.utexas.edu/content/training)
Tools you need to be trained on:
- Acid Hood
- Solvent Hoods
- Spin Hoods
- MJB4
- Plasmatherm 1
- CHA 1
- Dektak 150 (debatable)
Tools that you may need to be trained on:
- Oxford 80 RIE
- Oxford 100 ICP (Good for small feature etches, but not everyone needs it)
- MA6/MA8 (Basically you want an alternative if MJB4 is in-use or down)
- SEM (Not the one in our lab. Somewhat situational but many of our members use it)
- Raith (If you need to do E-beam)
Tools that are situationally useful but not many people are trained on:
- Wafer Bonder
- AFM
- Plasmatherm 2
- Plasmatherm 1 etching side (slow and somewhat unreliable)
- XRD (if you are doing MBE this goes up a category)
- CHA 2 (maybe)