Recommended Cleanroom Tools

This is meant to serve as a list of the most essential cleanroom equipment to be trained on, as a reference for new students. However, this is not a comprehensive list of equipment we use or need to be trained on.

A list of all tools in the cleanroom can be found at https://mrc.utexas.edu/facilities

For training, send requests to mertrain@mer.utexas.edu (See https://mrc.utexas.edu/content/training)

Tools everyone doing fab should be trained on:

• Acid Hood

• Solvent Hoods

• Spin Hoods

Tools that you may need to be trained on (Project-Dependent)

• SEM (NEON 40)

• SEM (Gemini 460, the newer SEM)

• CHA 1 (for metals)

• CHA 2 (for dielectrics)

• KJL e-Beam Evaporator (has largely replaced CHA #1 for our group)

• Bruker Dektak XT

• Atomic Force Microscope (digital instruments #2 in LabAccess)

• Oxford 80 RIE

• Oxford 100 ICP

• AJA Ion Mill

• Plasmatherm Deep Silicon RIE

• Plasmatherm #2 RIE

• Plasmatherm #1 PECVD

• Fiji ALD

• ALD Banerjee

• MJB4 or MA8 (or both)

• AML Wafer Bonder

• Raith (Old)

• Raith (New)

• JEOL

• JJ Woolam Ellipsometer

• JJ Woolam IR VASE Mid-Infrared Ellipsometer (to be installed)

• XRD (if you are a grower)