This is meant to serve as a list of the most essential cleanroom equipment to be trained on, as a reference for new students. However, this is not a comprehensive list of equipment we use or need to be trained on.

A list of all tools in the cleanroom can be found at https://mrc.utexas.edu/facilities

For training, send requests to mertrain@mer.utexas.edu (See https://mrc.utexas.edu/content/training)

Tools you need to be trained on:

• Acid Hood
• Solvent Hoods
• Spin Hoods
• MJB4
• Plasmatherm 1
• CHA 1
• Dektak 150 (debatable)

Tools that you may need to be trained on:

• Oxford 80 RIE
• Oxford 100 ICP (Good for small feature etches, but not everyone needs it)
• MA6/MA8 (Basically you want an alternative if MJB4 is in-use or down)
• SEM (Not the one in our lab. Somewhat situational but many of our members use it)
• Raith (If you need to do E-beam)

Tools that are situationally useful but not many people are trained on:

• Wafer Bonder
• AFM
• Plasmatherm 2
• Plasmatherm 1 etching side (slow and somewhat unreliable)
• XRD (if you are doing MBE this goes up a category)
• CHA 2 (maybe)