Plasmatherms

There are two (three?) Plasmatherm systems in our cleanroom. Each has two chambers and is supplied with different gases for different purposes.

Plasmatherm #1 is listed as "790 RIE Plasmatherm #1" in LabAccess, not "Plasmatherm PECVD" which is a completely different tool.

Plasmatherm #1 Left chamber (outside glove box) for PECVD

Mostly used for PECVD of dielectrics (SiNx, SiO2)

Available gases: 

Recipes

Logbook

Plasmatherm #1 Right chamber (inside glove box) for RIE etching

Mostly used as an RIE system. Can do things like O2 clean and descum. Generally easier to use Oxford RIE instead (personal opinion).

Available gases:

Plasmatherm #2 

Need experienced users to fill in this part.

Available gases:

Plasmatherm PECVD