Transducer Calibration

Sets the force constant of the load and displacement transducers.

• Calibration tab → System Calibrations (standard)
  • Ensure calibration constants for indentation axis match the numbers on the wall.
  • Once set, press "calibrate" and select "do cal air indent"

Workspace / Sample Definition

Sets boundary of the sample so you can navigate easily.

• Calibration tab → Stage Calibration (or sample navigation tab)
  
  • Create a new sample (can't overlap an old sample)
  • Move the crosshairs over the corners of the sample and select "Pos. Add" for all 4 corners

Tip to optic calibration

To set the z offset between the sample and objective.

• Calibration tab → Stage Calibration → "Slot 1 Tip to Optic Calibration"
  • Select "H-pattern" button
  • Focus on location you'd like to place the H pattern.
  • Next, it will ask to do a manual approach and bring the tip down to ~1mm above the sample
    • Risk of Crashing if you don't pay attention here
    • leaving it too high will only increase time required to approach sample. Play it safe.
    • Z height for tip to optic calibration of a typical silicon wafer on steel puck = ~49.7 mm
    • When about ~1mm above sample, check if the indenter tip is above the location you think it should be
      • if it is not, you may need to redo this tip to optic calibration. Instead of starting with "H" pattern, select the "set x and y axis offset to default" button.
        • This is a good starting point in case a previous user messed up the offset.
  • Once done, center on the H pattern.

Automating Acquisition

Can select locations to test and select a preloaded loading program for each location.

• Don't run a Method chain with the same method back-to-back or else it won't loop through them. It will stop after the first iteration. Need to have the cycle repeat.
  
  • i.e. 123451234512345 instead of 111222333444555

Creating Method

Setting Indentation Locations

Setting Load Function

Manual: