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For training, send requests to mertrain@mer.utexas.edu (See https://mrc.utexas.edu/content/training)
Tools
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everyone doing fab should be trained on:
Solvent Hoods
Spin Hoods
- MJB4
- Plasmatherm 1
- CHA 1
- Dektak 150 (debatable)
Tools that you may need to be trained on
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(Project Dependent)
JEOL
SEM (NEON 40)
SEM (Gemini 460, the newer SEM)
CHA 1 (for metals)
CHA 2 (for dielectrics)
KJL e-Beam Evaporator (has largely replaced CHA #1 for our group)
Bruker Dektak XT
Atomic Force Microscope (digital instruments #2 in LabAccess)
- (Good for small feature etches, but not everyone needs it)
- MA6/MA8 (Basically you want an alternative if MJB4 is in-use or down)
- SEM (Not the one in our lab. Somewhat situational but many of our members use it)
- Raith (If you need to do E-beam)
Tools that are situationally useful but not many people are trained on:
- Wafer Bonder
- AFM
- Plasmatherm 2
- Plasmatherm 1 etching side (slow and somewhat unreliable
AJA Ion Mill
Plasmatherm Deep Silicon RIE
Plasmatherm #1 PECVD
Plasmatherm #2 RIE
MJB4 or MA8 (or both)
Raith (Old)
Raith (New)
JJ Woolam Ellipsometer
JJ Woolam IR VASE Mid-Infrared Ellipsometer (to be installed)
XRD (if you are
doing MBE this goes up a category)CHA 2 (maybea grower)