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  • Oxford 80 RIE
  • Oxford 100 ICP (Good for small feature etches, but not everyone needs it)
  • MA6/MA8 (Basically you want an alternative if MJB4 is in-use or down)
  • SEM (Not the one in our lab. Somewhat situational but many of our members use it)
  • Raith (If you need to do E-beam)

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