The Auger will be used as an in situ metal deposition chamber. It will eventually be installed between Bravo and Echo, and will be connected to the MBEs via the buffer lines. The Auger and it's associated buffer line section are currently under construction.

As of July 2021, plan is to use system as in-situ patterned oxide deposition chamber. - AMG

Open

Standard Procedures

Venting / Pumping Down -- Fall 2016

Venting

1. Turn on "Chamber N2" on the Bravo wall -- the Auger N2 is plumbed into the same N2 line

2. Open gate valve between Auger and bufferline. Let pressures stabilize

3. Close gate valve to the ion pump -- leave the ion pump ON!

4. Turn off relevant gauges

   1. Auger ion gauge --> SRS IGC100

   2. Bufferline ion gauage --> MKS

   3. RGA --> Save current RGA scan first!

      1. If RGA is connected

         1. In the RGA software

            1. Save scan

            2. Stop RGA scan

            3. Turn off electron multiplier

            4. Turn off filament

            5. Disconnect RGA serial port

         2. Outside of RGA software

            1. Turn off the RGA by flipping its power button to off

            2. Disconnect the serial cable (white)

5. Turn off bufferline turbo by hitting the "Start/Stop/Reset" button once

6. Wait ~45 min for turbo to fully spin down

7. Slowly open all-metal valve on Auger N2 inlet to get that section of tubing under rough vacuum

8. Close scroll pump VPI, then turn off scroll pump

9. Use N2 green 1/4 turn valve to bring system to just below atmosphere

10. Unbolt system for opening

11. "3-2-1 GAS!" Open system and fully open the N2 green 1/4 turn valve

Pump down

1. "3-2-1 GAS!" Close system and close N2 1/4 green turn valve

2. Turn on scroll pump, open VPI valve

3. Wait for Pirani gauge to reach ~1e-0 Torr range

4. Close all-metal valve near N2 line on Auger

5. Turn on turbo pump by pressing the "Start/Stop/Reset" button once

   1. Toggle the turbo "Pump Current/Pump Temp/Power" button

   2. Wait for the turbo to reach normal operating conditions: 56k RPM, ~15 Watts, ~0.25 Amps

6. Turn on ion gauges

   1. Auger --> SRS IGC100

   2. Bufferline --> MKS, make sure to recover switch with a protective cap so it doesn't get accidentally bumped!

   3. RGA

      1. Turning on the RGA

         1. Make sure the ion gauge monitoring the chamber is in the low 1e-6 range. Don't use the RGA at higher pressures!

         2. Connect the RGA (outside of software)

            1. (If not already on the system) Install the RGA box. Make sure the orientation of the box is aligned with the correct connectors to the RGA port. Tighten the RGA to the system using the two screws on the back of the RGA box

            2. Connect a 24 V power supply cable to the power cord position on the back of the RGA box

            3. Connect the RGA serial cable to the back of the box

            4. Flip on the power button on the back. The green LED that indicates "Power" should be the only LED that is lit.

         3. In the RGA software

            1. Connect RGA serial port (need the serial number from back of the RGA box to know which box to connect to)

            2. When ready to start a scan...

               1. Turn on filament

               2. Turn on electron multiplier

               3. Pick scan type ("Analog" --> reads different molecules in the chamber. "Leak Check" --> helium leak checking)

               4. Save scan. Use a file naming system that makes sense. Include the date and brief description in the file name.

               5. Start scan

7. Wait for pressures to reach low ~1e-7s or high 1e-8s

8. Open ion pump gate valve

9. Monitor the ion pump for a few hours to make sure it is stable

10. Close Gate valve between Auger and bufferline

Restarting ion pump -- Fall 2016

If the ion pump turns off, the basic strategy is to get both chambers to a known pressure and re-pumpdown the systems using the bufferline turbo before attempting to restart the ion pump.

1. Keep gate valve to the ion pump open

2. Keep gate valve between Auger and bufferline closed, for now

3. Turn off all Auger and bufferline gauges

4. Turn off bufferline turbo and wait for it to spin down (~45 min)

5. Slowly open gate valve between Auger and bufferline to let the scroll pump get both chambers and the ion pump to rough vacuum

6. Turn turbo back on and wait for it to reach normal operation

7. Turn on bufferline ion gauge

8. With the ion pump gate valve open, press and briefly hold the "Start HV" button on the Gamma ion pump controller. Expect to see a arcing condition error, and the pump will likely turn off after a seconds with a *clicking* sound. Wait ~30 seconds and press the "Start HV" button again. Repeat this until the pump starts. This jump starting process could take up to an hour.

   1. The operating voltage displayed on the pump controller should increase and the current should decrease during each restart attempt.

   2. The stable operating voltage of the ion pump is -5400 V. The current should be in the micro Amp range.

9. After the ion pump is on and stable, leave all gate valves open so the turbo can pump with the ion pump over night

10. If all looks good the next day, close the gate valve between the Auger and bufferline. Leave the gate valve to the ion pump open

Venting / Pumping Down -- Spring and Summer 2016

Venting

1. If RGA is connected

   1. In the RGA software

      1. Save scan

      2. Stop RGA scan

      3. Turn off electron multiplier

      4. Turn off filament

      5. Disconnect RGA serial port

   2. Outside of RGA software

      1. Turn off the RGA by flipping its power button to off

      2. Disconnect the serial cable (white)

2. Turn off any filaments, e.g. ion gauges

3. Turn off the turbo pump by hitting the "Start Stop/Reset" button once

4. Wait for 30-45 minutes to allow the turbo to spin down sufficiently. Since there is no N2 line slowing the fan blades, this process takes longer than normal. Just wait it out.

5. Turn up Bravo nitrogen chamber line pressure, i.e the line closest to the gowning room door labeled "chamber" (Auger N2 valve currently plumbed into Bravo)

6. Close scroll pump VPI and turn off scroll pump that backs the turbo

7. Allow the chamber pressure to slowly come up

8. Slowly open the all-metal valve on the roughing manifold

9. Leak in N2 using the green quarter turn valve until the gauge pressure is just below zero. Then, close the green quarter turn valve

   1. Note: The Auger does not currently have an overpressure valve installed, so be careful

10. Put on respirators

11. Prepare the system for opening, e.g. loosen bolts on a flange

12. After final bolts are removed

    1. Person 1 removes pulls the component from the system, yelling "1-2-3-GAS!" while person 2 opens the green quarter turn valve

    2. This gives the Auger chamber and overpressure of N2, which prevents any contaminants

Pumping Down

1. Finish any vacuum maintenance with the system at atmosphere

2. Cover the exposed flange/opening with a gasket and appropriate component

   1. Person 1 puts the component on the system, yelling "1-2-3-GAS!" while person 2 closes the green quarter turn valve

   2. This removes the chamber overpressure of N2

3. Tighten down the bolts on the system, making sure that the bolts are tightened to spec (e.g. 180 in-lbs)

4. Close all-metal valve on the roughing manifold

5. Close the N2 quarter turn valve

6. Turn on scroll pump that backs the turbo

7. Wait for the scroll to bottom out

8. Turn down Bravo N2 flow

9. Turn on the turbo by hitting the "Start Stop/Reset" button once

10. Wait for the turbo to spin up to its max speed (56k RPM for old style)

11. Turn on ion gauge and check that the pressure is in the mid to low 1e-6 range

    1. If not below the mid to low 1e-6 range, turn off the ion gauge and ask for help from an older student

12. Turning on the RGA

    1. Make sure the ion gauge monitoring the chamber is in the low 1e-6 range. Don't use the RGA at higher pressures!

    2. Connect the RGA (outside of software)

       1. (If not already on the system) Install the RGA box. Make sure the orientation of the box is aligned with the correct connectors to the RGA port. Tighten the RGA to the system using the two screws on the back of the RGA box

       2. Connect a 24 V power supply cable to the power cord position on the back of the RGA box

       3. Connect the RGA serial cable to the back of the box

       4. Flip on the power button on the back. The green LED that indicates "Power" should be the only LED that is lit.

    3. In the RGA software

       1. Connect RGA serial port (need the serial number from back of the RGA box to know which box to connect to)

       2. When ready to start a scan...

          1. Turn on filament

          2. Turn on electron multiplier

          3. Pick scan type ("Analog" --> reads different molecules in the chamber. "Leak Check" --> helium leak checking)

          4. Save scan. Use a file naming system that makes sense. Include the date and brief description in the file name.

          5. Start scan

To do list

Components

QCM (Quartz Crystal Monitor)

Overview

This is used to monitor the thickness of metal deposition (ideally for an ebeam) during a growth. Changing the thickness of the material deposited on the crystal changes its resonance vibration, which is converted into a deposition rate/thickness measurement.

The Auger QCM is manufactured by Inficon Inc. The Contact info for the engineers and sales reps are:

• Chris.Wagner@inficon.com

• Russ.Holm@inficon.com

The product info page is give: INSERT

Products from Inficon:

1. Crystals

   1. Last time we bought the cleanroom pack of 10 6 MHz gold crystals (PN 008-010-G10) and a crystal snatcher (PN 008-007)

   2. ~$10/crystal, come in packs of 10

   3. Quartz crystal product page

2. Solenoid valve for QCM shutter actuation

   1. Need to buy the solenoid valve (PN 750-420-G1) that is specified for Inficon's QCM control box (XTC)

   2. ~$165/valve (after 10% university discount)

Manuals and System Components

Cooling Shroud Arm for DD Cell

Overview

Provides water cooling to MBE-style dual dopant cell during operation. Water must be drained before venting system. Water lines will be hooked up to Echo roughing manifold. Comes with an attached shutter at the in-vacuum side, which currently must be operated manually. The cooling shroud is a custom design manufactured by MBE Komponenten.

Contacts:

• Frank Huber (huber@mbe-komponenten.de)

• Phil Befumo (pbefumo@umccorp.com)

Special handling instructions

• Make sure water return (labeled OUT) is up when you install the cooling shroud arm

• The source end of the reducer flange uses metric studs!

  • The blank is meant to slide off of these studs once the nuts are removed

  • These studs are difficult to re-insert once removed, which can lead to cross-threading of the threads in the flange. - sad voice of experience

  • 3 of the holes were drilled out and re-threaded in the Pickle machine shop, Feb 2016. Ask Kyle, Stephen, Andrew, or Terry for details.

• Flow rate specification:

• Water pressure specification:

To Do

• Order Swagelok water line connectors for this part.

• Hook up to Echo water manifold (after moving Auger to final position)

• Install DD cell

• Automate shutter

DD (Dual Dopant) Cell

Ion Pump

Turbo Pump / RM (temporary)

Substrate Manipulator

E-beam

Rackmounts

“The issue is mostly a result of me designing the tables around the racks that I had originally ordered. I designed the width of the electronics wrack portions assuming a certain distance from the rack mounting holes to the beams that the mounting rails are attached to. The new mounting rails added ~ 1/8" of space on each side making the total spacing ~18.75". To avoid this in the future, we'll need to factor the rack mount rails into the design process/make sure the rails we install will work with the design we have.” -- KMM, March 2016

What We Would Like to Get

From Penn-Elcom:

• R883-1032 (this is the #10-32 model, not the M6)

• We need 4x16 U (for BOS) and 12x17 U (for Auger and buffer table)

• (Where U = 1.75”. It’s the standard unit of height for rack boxes, e.g. QCM controller is 2U)

• http://www.penn-elcom.com/default.asp?PN=R0883-M6%20-%20R0883-1032&LG=ENG

Order #10-32 cage nuts from McMaster.

The cage nuts for the square holes on the rackmount pieces are industry standard size. It is simply a matter of specifying the cage nut size you want that will go into the square hole. Penn-Elcom did not have the #10-32 cage nuts, but McMaster did. We use #10-32 for all our other systems. We want to keep the #10-32 size to keep all our shelves in the lab standardized.

What We Actually Purchased

The Penn-Elcom R0883-1032 was a new product and only available for immediate shipping to the UK in March 2016. It had a 14-week lead time to the USA and had to be special ordered. We could consider this product in the future, but it was simply too new when we wanted to place the orders in March 2016.

Instead, we ordered a product that was available from the USA:

• Bud Industries

• Product No. PMR-9449

• “Rail, Panel Mounting; 31.5 in.; #10-32 Tapped; 12 ga. Steel; Smooth Black”

  • https://www.alliedelec.com/bud-industries-pmr-9449/70149165/

• CAD sheet:

  • http://www.alliedelec.com/images/products/datasheets/bm/BUD_INDUSTRIES_INC/70148490.pdf

Sub Account-83 Purchasing

For reference the Auger equipment tag number is 883384

Large non-consumable purchases for the Auger should be made through sub account-83. Anything over a couple hundred dollars dollars should be considered a large purchase. Examples of non-consumables are swagelock/pipe fittings, valves, nipples ect... Examples of consumables are bolts, gaskets and the like.

Label your sub account-83 invoices in the following way:

• Sub account-83

• Equipment Tag: 883384 Auger (brief description of your non-consumable application)