Photolithography Masks
Masks on hand
Name | Description | Images | LEdit files | Submission Files |
2010 TJ + TLM | Masks for metal and mesa etch for tunnel junctions and various tlm structures |
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2011 LASER | Masks for laser processing. Designed to allow both gain-guided and ridge-waveguide processes. For a single mask process, use the "ETCH" mask. For a dual mask process, use the "ETCH" mask followed by the "METAL" mask. | |||
2013 LASER | Masks for laser processing. Designed to allow both gain-guided and ridge-waveguide processes. For a single mask process, use the "ETCH" mask. For a dual mask process, use the "ETCH" mask followed by the "METAL" mask. Differences from 2011 LASER are larger spacing between laser bars to ease separating them for epi-down mounting, added cavity length markers every 1/2 mm to ease cleaving to a desired cavity length, and changed to 50, 100, and 150 um wide laser bars. For smaller bar widths, use 2011 LASER. | |||
March 2013 LASER | Adds a SiN mask, for ridge waveguide process. |
To export to CIF for submission (in LEdit):
First create a new empty document
Instance you're master cell into it.
Go to Cell >> Instance... Select the file at the top that contains the master design, select it and hit OK.
Go to Cell >> Flatten... This could take a bit of time and will result in all objects being directly inserted instead of instanced.
Add CIF names to the layers you used.
Go to Setup >> Layers...
Select a layer on the left, and enter a CIF name on the right, then hit OK.
Export to CIF
Go to File >> Export Mask Data >> CIF...
Where to order photolithography masks from:
Short turn-around (~2 weeks or less)
Fairly Cheap (~$300 per mask)
Good quality
Examples: LASE 2011 LASER