Photolithography Masks

Photolithography Masks

Masks on hand

Name

Description

Images

LEdit files

Submission Files

2010 TJ + TLM

Masks for metal and mesa etch for tunnel junctions and various tlm structures

 

2011 LASER

Masks for laser processing. Designed to allow both gain-guided and ridge-waveguide processes. For a single mask process, use the "ETCH" mask. For a dual mask process, use the "ETCH" mask followed by the "METAL" mask.

2013 LASER

Masks for laser processing. Designed to allow both gain-guided and ridge-waveguide processes. For a single mask process, use the "ETCH" mask. For a dual mask process, use the "ETCH" mask followed by the "METAL" mask. Differences from 2011 LASER are larger spacing between laser bars to ease separating them for epi-down mounting, added cavity length markers every 1/2 mm to ease cleaving to a desired cavity length, and changed to 50, 100, and 150 um wide laser bars. For smaller bar widths, use 2011 LASER.

March 2013 LASER

Adds a SiN mask, for ridge waveguide process.

 

To export to CIF for submission (in LEdit):

  • First create a new empty document

  • Instance you're master cell into it.

    • Go to Cell >> Instance... Select the file at the top that contains the master design, select it and hit OK.

  • Go to Cell >> Flatten... This could take a bit of time and will result in all objects being directly inserted instead of instanced.

  • Add CIF names to the layers you used.

    • Go to Setup >> Layers...

    • Select a layer on the left, and enter a CIF name on the right, then hit OK.

  • Export to CIF

    • Go to File >> Export Mask Data >> CIF...

Where to order photolithography masks from: