Filmetrics Thin Film Measurement Tool
Hi all, here is a short guide for the Filmetrics tool in the cleanroom. Reportedly (as of September 5 2024) it will be replaced by a better model in the near future, but until then if you want to use it here are some instructions. It is located just to the left of the JJ Woollam Ellipsometer in the metrology bay. A picture is below.
Turn on the four lamp switches. These are the blue one, white one, and red one on the white box, and then the green one at the front of the tool. I always go blue, white, red, green, but not sure if it matter.
Log into the tool through the computer to the left of it - the password should just be “filmetrics”.
Start the software from the desktop.
(Optional) Let the lamps warm up for 5 minutes.
Go to the measure tab in the software, click baseline.
Load your sample onto the center of the stage.
Click “Take Reflectance”.
Click the auto focus button, then autoscale gain, then auto focus again. Then hit ok.
Remove your sample.
Load up the 6” Si reflection sample (picture below). This is a standard provided by the company. Click “Take Si reflectance standard” or something like that. Click the auto focus button, then autoscale gain, then auto focus again.
Unload the Si reflectance standard carefully and store it back in its case.
Use the “go to” controls to go to 0, 0.
Load your sample back in the middle of the stage.
Click “Measure”.
Now you have your data, and can click “edit recipe” to put in what you think your stack is. I usually use n and k = 10 for the film I’m trying to measure. Plug in your best guess as to the thickness, and give it a 95% range to fit around.
It should generate a fit that matches your data - you can see the goodness of the fit in the panel on the bottom right.
Unload your sample, close the software, and turn off all the lamps. I don’t log out, I just let the computer go to sleep in its own time.