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JEOL (jbx-8100fs)

JEOL (jbx-8100fs)

You have to create pattern (.v30), jobdeck (.jdf) and schedule (.sdf) files using the BEAMER software in the pc located in room 2.820. You can log into the pc using your UT eid and password. The password for rest of the systems in this setup (WinSCP, PuTTY and JBX writer software) is the standard one -

  • You need to use the existing files mentioned above to create a magazine (.mgn) file using the JEOL system. It can either be done at the tool itself or by connecting remotely through the beamer pc using PuTTY. I would suggest you create it at the beamer pc itself to make sure there are no errors in the files you created earlier. For this,

    • In a new window (one without the JBX writer), open the folder where the files are located and open a terminal (rt clk -> open in terminal).

    • Then type in the following command -> schd -exptim 'file name (without extension)'. '-exptim' is optional but it will display the time remaining in the exposure step if used here.

  • EBX writer should be open by default in window 1. In the 'Auto Loader' tab you can see that the status of the cassette you will be using. We usually use the small-pieces cassette placed in shelf slot 5.

    • You can remove the cassette from the shelf and place it on the aluminum foil at the table upside down.

    • Using two fingers, press down and rotate the wings holding the sample holder in the cassette and remove the sample holder placing it face up (wings down) next to the cassette on the foil to avoid scratching the surface of the sample holder.

    • You need to add a spacer (or a combination of spacers) matching the thickness of the sample you'll be mounting. Its to offset the height of the sample which needs to be at the zero level for purposes of the tool. Make sure that they match the groves on the cassette. In case of multiple spacers, remember the order as they need to be placed back into their respective covers after usage.

    • After checking to make sure that the spacers aren't bent, place back the sample holder and secure using the wings.

  • Click on the 'Load' button in the Auto loader window and wait till the cassette is loaded into the vacuum chamber. The load button will be green till the process is completed. Do not press anything till it turns back to gray. It takes about 5min.

  • Once the sample is loaded, you need to select the e-beam conditions you want to run in the 'Condition' section. Go to Condition Setting->Condition file name->Select. EOS mode 3 is for high throughput processes and 6 is for high resolution. Select your preferred file and click 'OK'. Make sure 'Restore' and 'DEMAG' are selected and click 'Execute'.

  • Once the condition file is loaded, we need to calibrate the system for the selected beam current and aperture.

    • In the 'Calibration' section make sure options Current Adjustment, Standard Marks Detection, Focusing and Deflection correction are selected  and click 'Execute'. This will take 15-20min.

    • 'Material Correction' is for alignment marks detection and angle correction and can be done separately, else a pre-saved Correction file can be loaded and the material correction can be executed alongside the rest of the calibration settings. 

    • In case you want to run the 'material correction' with other options, do the next step before you execute these options. 

  • In the 'Stage Control' tab, you can type the coordinates you extracted from the Navitar microscope in Target Position [um] -> X, Y.

    • Click on 'Cassette Type' and make sure 'Wafer' and '6.0' (for small pieces cassette) are selected. Click 'OK'

    • Make sure Coordinate System - 'Substrate' and Target Position [um] - 'Absolute' settings are applied before you click on 'MOVE'. 

    • You can click on 'OM' (turns green) to view the sample with the internal optical microscope and position the alignment mark to the crosshair better. Use the arrows to do so. You can change the pitch for the arrows by changing the value in step/um.

    • You need to switch to 'INPUT 1' to view the image on the  popout monitor.

    • Once you are satisfied, click 'OM' to switch off OM mode (turns back to gray).

    • While the popout monitor is set to input 1, you can click on 'HEI' button to check that the LED can properly measure your substrate height. If the height is greater than +/- 130um, you'll need to switch spacers till it confines to this range for the substrate height.

    • You can click on 'HEI' to turn it off and switch back to 'INPUT 2'.

    • You can view the marks in 'SEM' mode to fine tune the crosshair to the center of the mark using the arrows. You can play with the magnification (x1, x64, x128), brightness, contrast and scan width till you see a clear image of the substrate.

  • Alignment step

  • Use material correction tab and load your correction file

  • Change PQRS to the same as visual job

  • Click move to position close to alignment marks(this brings you back to the sample after alignment)

  • Click OM then input 1

  • Center mark as best as possible using upper right arrows

  • Click OM to deselect OM

  • Set the stage control fixed position to BE 

  • Click SEM tab bottom (not to turn on SEM)

  • Turn on grid check mark under the SEM tab

  • Make sure scan width is 30000 or small enough to see alignment marks clearly

  • Click input 2 then SEM

  • Adjust for mark detection: Switch to x56 Brightness BTO 1536 Contrast  2703 -this is greyed out until you turn on SEM

  • Use arrows to center on mark as best you can

  • Take picture of current position (upper right)

  • Click SEM to deselect

  • Use the current position in the global mark tab label offset. Click save in bottom right

  • Click execute in the global mark tab bottom right

  • Click update and save in bottom left

  • Mark detection execution check - continue.

    • —if it fails press cancel

    • Can change scan width under rough detect condition -50-70um scan width is good\

    • Can also try decreasing the error tolerance on the mark

  • Go to desktop (bottom right either icon or grey square open new tab)

  • Open folder with .sdf file. Open .sdf and change offset to offset in global mark

  • Save and close SDF

  • Right click in same folder and open in terminal

  • schd -exptim <filename no extension>.  I usually call my filename VisualJob

  • Close terminal

  • Go to exposure tab and click open in the upper left and select the .mgn file

  • Click on start exposure and wait until finished.

  • Unload cassette. Wait for the unload button to not be green and greyed out

  • Remove sample from cassette and put in sample holder.

  • Remove spacer return cassette

  • Make log entry

  • Sign out of JEOL aligner

  • Unfinished (TBC)