CHA1 Logbook
| Date | Metal (CHA parameter) | Power (%) | Rate (Angstroms/s) | Thickness (nm) | Notes if any |
|---|---|---|---|---|---|
2021-06-12 Yinan | Pd Ti Pt Pt Au | 34.1 32.5 40 41→41.5 35.6 | 0.6 1.2 → 1.5 0.5 1..0→ 0.8→1.1 1.8-2.1 | 3.2 52 14.9 36 100 | Had dirty Pt, metal was very bad for wire bonding During Pt evaporation, the dep rate kept dropping. Drops more if move beam around |
2021-08-05 Yinan | Al | 35.1 | 1.1 → 1.5 | 100 | For Acoustic Resonators (LiNbO3 on Sapphire). Fresh melt, Rico says crucible (graphite) will definitely break after a couple of times of use, likely 5-6. Rise 2 finishes at 32%, it starts to melt slightly into a big ball. Then the ball will roll to the side and attach to the crucible wall (later will be causing stress and breaking the crucible), RIP in advance... |
2021-08-19 Jiaming | Ti Au | 31.5 35.7 | 0.2 0.5 | 5 45 | |
2021-08-24 Yinan | Pd Ti Pt Au Au | 34.0 32.5 42 36.6→36.2 36.1 | 0.4 1.2→1.4 1.8* 2.4 2.2 | 3.1 53.4 50.8 ~170* 85.7 | *Pt: Opened after soak2 (41%), rate was 2.6 then quickly dropped to ~1.0. After pwr up to 42%, rate would jump around (up and down) *Au: Raster and then kept control of pwr and position to target 2.4 rate. ~170 no accurate because power supply shut down (logged off due to time) and after panicking (noob) the thickness was zeroed. |
2021-08-30 Zuoming | Ti Au | 32.5 37.4 | 0.8 1.7 | 14 117 | |
2021-08-30 Yinan | Ti Au | 31.5→32.5 37.0 | 0.5→1.3 1.8→2.2 * | 22.6 202.1 | *: Au dep rate fluctuates quite a bit, was dipping to 1.5 at some point but also spiked to 2.5 at another |
2021-08-30 Yinan | Al | 36.0 | 1.1 → 1.5 | 82.2 | Al is harder to melt once crept up to one side Had weird gold color stains after finish (Rico says this contamination might be from dirty chamber) |
| 2022-01-23 | Ti Pt Au | 33 41.8 37.5 | 1.1→ 1.5 1.8 1.8 | 50 50 123 | Added 7-8 new drops of Au |
