(QPI NASA Rubidium) WJD + AMG regrowth stream of consciousness
Samples wanted for Rb implantation
3” GaAs Uncoated
3” GaAs with 200nm of SiO2
1/2 2” GaP
1/2 2” GaP with 200nm of SiO2
**Implantation energy and concentration TBD after talking to Byron this week.
Possible experiments to run post implantation
SIMS on an untreated wafer
Anneal and then to SIMS
Anneal and apply E field using wafer bonder
GaP regrowth plans
P-limited RHEED osc
GaP on SiO2/GaAs films (can incorporate into AMG’s study) (Dep Wed)
(2x?) DJI SiO2 gratings on GaP (~25-30 nm thick SiO2)
Selectivity, PSE for faceting and planar coalescence
Things to figure out
GaP Bandedge temperature calibration file (n-GaP)
See Kyle’s growths for deoxidation and away bake temperature
P-limited RHEED osc (ask Amberly for help)
Change valve motor parameters (Thurs)
Wet etch of oxide? GaP is etched by HCl, just try a dilute etch to start? maybe NH4OH if bad?
Check DJI mask and dimensions MA8 on GaAs
Will AD-10 etch GaP, just try it, not much lit