Venting Load Lock for Loading

Navigate to the Veeco Instruments Lot Manager software. This software allows you to control transfers within the entire system as well as schedule them before and after running growth recipes. It will also display alarms and warnings to let the user know current status and issues with the tool.

Navigate to the overview tab and find the platen you want to retrieve from the system for loading/unloading wafers.

Verify the growth chamber and its cells are in their idle state if you are removing a platen after a growth. Also verify pressures between chambers are similar enough (within order of magnitude) for safe transfer.

Drag and drop the platen instance to an unoccupied load lock “LL1” position. The robot transfer arm will automatically conduct the transfer.

After transfer, click the 3 menu bar dropdown menu in the LL tab, click pump/vent, then vent.

Wait for venting procedure to finish.

Pick the elevator level(s) you want to load to, then press load. It will automatically move the elevator to the correct position and indicate that you need to open the LL door and transfer your sample in/out.

Close the door and the elevator will move to the next position if you selected more than one level.

After loading, close the door and go back to the pump/vent menu for the LL and click pump.

Start a LL bake recipe