This was adapted from the original "Cleanroom Basics Email" by NTS. This article may need some updates

This page consolidates emails from Spring 2015 to our summer intern, divided by signs to indicate the different parts. Please read all the sections and any recommended readings within each part. - NTS

Part 1: Getting into the UT Cleanroom

Before you can shadow me in the cleanroom, you'll need to complete a few prerequisites:

• Cleanroom Safety Training: Coordinated by Darren (darren@mer.utexas.edu). This training is usually held in a room above the center lobby of MER.

• Building/Lab Access: After completing the safety training, you'll need to get cardkey and afterhours access approvals from James Hitzfelder (jameshitz@mer.utexas.edu).

References:

• MRC Website: http://www.mrc.utexas.edu/

• Pickle Research Campus Map: http://www.utexas.edu/maps/prc/index.html

Part 2: Introductory Readings on Cleanroom Processes

• Start with these sections on MEMSnet:

  • Deposition

  • Lithography

  • Etching MEMSnet Process Information

• Review this illustration of the photolithography etching process: Photolithography Etching Process

• Further reading on microfabrication etching and profilometry:

  • Etching for Microfabrication (Wikipedia) (Skip Sections 2.2 and 3)

  • Profilometry (Wikipedia), Section 1 "Types"

Part 3: Cleanroom Operations and Etiquette

• Safety and Procedures: Accidents must be reported immediately for safety and prompt problem resolution.

• Reservations and Scheduling: Tools in the cleanroom may require reservations, made in half-hour increments. Flexibility in scheduling is crucial due to shared access.

Part 4: Training Videos and Notes

• Cleanroom Training Videos:

  • Video 1: YouTube Link (Note on ISO specification relevance)

  • Video 2: YouTube Link (Setup and rules at UT)

  • Video 3: YouTube Link (Fume hood usage and safety)

Part 5: Cleanroom Jargon and Abbreviations

• Common Terms:

  • SiNx (Silicon Nitride), Litho (Lithography), Dep (Deposition), Dev (Development), IPA (Isopropanol), PR (Photoresist), N2 (Nitrogen), UHV (Ultra High Vacuum), Epi (Epitaxy)

Part 6: Graduate Student Responsibilities and Terminology

• Grad Student Roles:

  • Attending and teaching classes, conducting research, preparing papers and presentations, booking and attending conferences, purchasing lab supplies, and maintaining lab tools and machines.

Jargon Definitions:

• Tool: A device or system used for a specific process in the cleanroom.

• Instrument: A device used for measurements.

• Machine: Specifically refers to systems like Molecular Beam Epitaxy (MBE).

• Sample: The object being modified in the cleanroom processes.

• Recipe: A series of steps performed on a tool to modify a sample.

• Process: A comprehensive set of steps, possibly involving multiple recipes, leading to a final product.