Plasmatherm #1 Recipes

Written by NTS, 04/08/2013

P = pressure, units are mT or scientific notation for torr (e.g. 500 = 500 mT, 2e-2 = 20 mT)

T = temperature, units are C

Ti = time, units are minutes unless otherwise specified

G = gas, units are whatever are displayed on tool (sccm or % of max MFC flow)

RF = RF power

PECVD

O2CLN250

1. Initial Step

   1. P = 2e-2

   2. T = 250C

   3. Ti = 1

2. Purge

   1. P = 500

   2. Ti = 1

3. Evac

   1. P = 2e-2

   2. Ti = 1

4. Evac

   1. P = 2e-2

   2. Ti = 1

5. Process

   1. P = 800

   2. G = CF4/O2, 10 [sccm?]

   3. Ti = 30 sec

6. Process

   1. P = 800

   2. G = CF4/O2, 10

   3. RF = 80W

   4. Ti = Variable, 10 min default

7. Evac

   1. P = 2e-2

   2. Ti = 2

8. Purge

   1. P = 500

   2. Ti = 2

9. Evac

   1. P = 2e-2

   2. Ti = 1

10. End

    1. P = 1.8e-2

    2. Ti = 10 sec

    3. No vent

AMC_SIN

1. Deposits ~20nm/min

2. Initial Step

   1. P = 2e-2

   2. T = 250C

   3. Ti = 15 sec

3. Purge

   1. P = 300

   2. Ti = 1:15

4. Evac

   1. P = 2e-2

   2. Ti = 1:15

5. Purge

   1. P = 500

   2. Ti = 1

6. Evac

   1. P = 2e-2

   2. Ti = 1:10

7. Process

   1. P = 580

   2. G = NH3, 10 [sccm?]; N2, 500; SIH4, 56

   3. Ti = 10 sec

8. Process

   1. P = 580

   2. G = NH3, 10 [sccm?]; N2, 500; SIH4, 56

   3. RF = 60W

   4. Ti = Variable, 13 min default

9. Evac

   1. P = 2e-2

   2. Ti = 1:30

10. Purge

    1. P = 500

    2. Ti = 1

11. End

    1. P = 2e-2

    2. Ti = 10 sec

    3. Vent yes

RIE

O2CLN

1. Initial Step

   1. P = 3e-2

   2. Ti = 10 sec

2. Purge

   1. P = 500

   2. Ti = 10 sec

3. Evac

   1. P = 3.5e-2

   2. Ti = 2

4. Process

   1. P = 100

   2. G = O2, 50 [sccm?]

   3. Ti = 1

5. Process

   1. P = 500

   2. G = O2, 50

   3. RF = 300W

   4. Ti = Variable, 15 min default

6. Evac

   1. P = 2e-2

   2. Ti = 3

7. Purge

   1. P = 500

   2. Ti = 10 sec

8. Evac

   1. P = 5e-2

   2. Ti = 10 sec

9. Purge

   1. P = 500

   2. Ti = 10 sec

10. Evac

    1. P = 2e-2

    2. Ti = 10 sec

11. End

    1. P = 2e-2

    2. Ti = 10 sec

    3. No vent

SIN_CF4

1. Initial Step

   1. P = 5e-2

   2. Ti = 10 sec

2. Purge

   1. P = 500

   2. Ti = 20 sec

3. Evac

   1. P = 2e-2

   2. Ti = 2

4. Process

   1. P = 75

   2. G = CF4, 40 [sccm?]

   3. Ti = 30 sec

5. Process

   1. P = 75

   2. G = CF4, 40

   3. RF = 50W

   4. Ti = Variable, 1 min default

6. Purge

   1. P = 500

   2. Ti = 10 sec

7. Evac

   1. P = 2e-2

   2. Ti = 1

8. Purge

   1. P = 500

   2. Ti = 10 sec

9. Evac

   1. P = 2e-2

   2. Ti = 30 sec

10. Purge

    1. P = 500

    2. Ti = 10 sec

11. Evac

    1. P = 1.5e-2

    2. Ti = 10 sec

12. End

    1. P = 1.5e-2

    2. Ti = 10 sec

    3. No vent