RTA Allwin 610 Procedure

edited from what the MRC has posted (http://www.mrc.utexas.edu/index.php/nnin/processequipment/north-cleanroom/75). NTS, 04/08/2013

[Note: No metal allowed in system.]

[Note: Do not leave the CDA on after use!]

Prep

1. Log on to the tool using the LabAccess terminal.

2. Go to the RTA and look for any maintenance notices. Check logbook for any notes about the operating performance.

3. Turn on the power (I’m not sure what this means at this point)

4. Go to service aisle behind RTA. Turn on the “clean dry air” valve. Should be loudish.

   1. The HE associates valve, the green valve.

      1. Cooler should be at 20C, don’t recall the display being on.

   2. (This was not done during training: Turn on the N2 (or other chosen gas). DO NOT touch the pressure regulator for the N2. Doing so could break the quartz tube, which is very expensive.)

5. There are four gases next to the RTA: Forming, N2, X, and O2

6. Turn on N2 valve, beside the RTA, until the pressure gauge on the front of the RTA reads 3psi.

7. Turn on the RTA.

8. Log on to software; User, User (maybe not capitalized)

Setup Recipe and Load Sample

1. Find and Load the recipe that you wish to run.

   1. You can piggyback someone else’s recipe, but if you change anything you should save it as another file—do not mess up other users’ recipes.

   2. Recipes will commonly have the temperature in the filename.

2. Go to edit recipe.

   1. Set the time you want for the process step, steady time.

   2. Always check the recipe time.

      1. 10d. Intensity factor should be optimized to prevent overshoot.

   3. Validate recipe.

   4. Save as recipe, save or rename.

3. [Note: Only Pyrometer setting is available. Pyrometer can’t measure <400C.]

4. Do a dummy run to make sure the program is running correctly.

   1. Skipping this step could produce a process error and ruin your sample.

   2. Run recipe; see Step 13 to run the recipe.

   3. Wait until the chamber has cooled, ~5 minutes, before opening the chamber and loading your sample.

5. Load Sample on top of a carrier wafer (mounting specifics to be figured out)@#$%

Run Recipe and End Use

1. Run recipe.

   1. Click process production.

   2. Watch lines (labeled on graph).

   3. When program is finished, hit Stop Not Save.

   4. Wait at least 5 minutes before opening the chamber to unload your sample. Skipping this step could cause bowing in your sample and/or the Si wafer.

2. Remove sample from RTA chamber.

3. Fill out/Sign the Log Book and record any problems that you encountered while running your program.

4. Close the N2 valve completely shut.

5. Turn off the RTA.

6. Go to the service aisle behind RTA. (Not done: Turn the N2 valve to the off position.) Turn the “clean dry air” valve off!

7. Log off of the tool using the LabAccess terminal.