PT#1L Logbook

PT#1L Logbook

Check PlasmaTherm #1 left chamber recipes here.

 

Date

Recipe name

Run time

Results

Notes

Date

Recipe name

Run time

Results

Notes

2022-01-17

ywsin250

20 min

570 nm

 

2022-01-20

ywsin100

20 min

710 nm

 

2022-03

aksio100

50 min

~3900 nm

 

2022-03

aksio100

50 min

~4200 nm??

 

2024-07-23

ynsin100

20 min

704 nm

 

2024-08-31

aksio100

6.5 min

~420 nm

 

2024-10-24

aksio100

3.1 min

170-175 nm