PT#1L Logbook

PT#1L Logbook

Check PlasmaTherm #1 left chamber recipes here.


DateRecipe nameRun timeResultsNotes
2022-01-17ywsin25020 min570 nm
2022-01-20ywsin10020 min710 nm
2022-03aksio10050 min~3900 nm

2022-03

aksio10050 min~4200 nm??
2024-07-23ynsin10020 min704 nm


2024-08-31aksio1006.5 min~420 nm
2024-10-24aksio1003.1 min170-175 nm