Cryopump Interlock

Cryopump Interlock

Bravo

1. Disable Cryo Interlock:

  • Access the GC IG SRS Interface: a. Press the Process button. b. In the IG 1 box, press and switch the mode from Auto to Manual. c. Press Pressure:Back to return to the normal Ion Gauge (IG) pressure screen.

2. Open the Cryo Gate Valves:

  • Open each cryo gate valve one at a time, ensuring stable operation before proceeding to the next.

3. Enable Cryo Interlock:

  • Reconfigure the GC IG SRS Interface:

    1. Press the Process button.

    2. In the IG 1 box, press and switch the mode from Manual to Auto.

    3. Press Pressure:Back to return to the standard IG pressure screen.