Cryopump Interlock
Bravo
1. Disable Cryo Interlock:
Access the GC IG SRS Interface: a. Press the
Processbutton. b. In theIG 1box, press and switch the mode fromAutotoManual. c. PressPressure:Backto return to the normal Ion Gauge (IG) pressure screen.
2. Open the Cryo Gate Valves:
Open each cryo gate valve one at a time, ensuring stable operation before proceeding to the next.
3. Enable Cryo Interlock:
Reconfigure the GC IG SRS Interface:
Press the
Processbutton.In the
IG 1box, press and switch the mode fromManualtoAuto.Press
Pressure:Backto return to the standard IG pressure screen.