Platinum Wet Etch

O2 plasma March Asher ICP oxford RIE (50sccm 120mTor 15min)
Hard bake 150 ⁰C 5-10ms
G14, Put sample in holder, second position, face up
Tripe rinse everthing
Use wipe to clean outer wall of glass container and put it on hotplate
37%600ml HCL +70% 200m HNO3 (turn to be yellow and smells bad)!
set tempurature of hotplate to 200⁰C, Themoeter in (mask on)
wait 15mins and tempurature should go to 80⁰C
Sample holder in -2mins clean themometer
QRD → start→ change mode→ spray mode
Smple holder in QRD