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Platinum Wet Etch

Platinum Wet Etch

Sep 06, 2023

 

  1. O2 plasma March Asher  ICP oxford RIE (50sccm 120mTor 15min)

  2. Hard bake 150 ⁰C 5-10ms

  3. G14, Put sample in holder, second position, face up

  4. Tripe rinse everthing

  5. Use wipe to clean outer wall of glass container and put it on hotplate

  6. 37%600ml HCL +70% 200m HNO3 (turn to be yellow and smells bad)!

  7. set tempurature of hotplate to 200⁰C, Themoeter in (mask on)

  8. wait 15mins and tempurature should go to 80⁰C

  9. Sample holder in  -2mins clean themometer

  10. QRD → start→ change mode→ spray mode

  11. Smple holder in QRD