2 Nitride Layer
a. Piranha clean
b. MRL LPCVD Silicon Nitride Furnace
Recipe: LS_Nit. Deposition time: 1.5 hr. 200 nm thickness.
, multiple selections available,
a. Piranha clean
b. MRL LPCVD Silicon Nitride Furnace
Recipe: LS_Nit. Deposition time: 1.5 hr. 200 nm thickness.