Please use this area to upload/view information relating to lab procedures in the MBE room.

Systems: System Bravo, System Echo

Standard Operating Procedures (SOP)

• MBE Recipes

• Adjusting Source Cell PID Values

• SRS Ion Gauges

• Atomic Hydrogen Station

• Growth Checklist

• Loading Wafers

• Wafer Tracking

• Prepping Si Wafers

• System Bravo Growth Procedures

• System Echo Growth Procedures

• System Bravo Idle

• System Echo Idle

• Echo Auger Electron Gun

• GaAs RHEED Oscillations (Standard)

• Group V Limited RHEED Oscillations (For GaSb)

• Auger System

• Arsenic Trash

Non-SOP

• Power Outage (Unplanned)

• Power Outage (Planned)

• Facilities Maintenance

• Stuck Group-III Shutter

  • Stuck Indium shutter

• Freezing Aluminum

• Leakchecking (RGA)

• Warming up the Substrate Heater from VCT

• Oval defect mitigation

Maintenance

System Openings

• Idling Cells For Opening

• Source Flange Prep for Opening

• Source Flange Prep Journal

• Opening Checklist

  • Unmodified from Stanford

• Venting and Pumping the MBE System

• Bravo Venting and Pumping Down (outdated)

• Glovebagging

• Leak Checking

• System Bravo Things To Do Next Opening

• System Echo Things To Do Next Opening

• Bravo MBE Bring Up

• Echo MBE Bring Up

• Tyvek Suit Use

• Baking System

General

• Loading Source Material

• Scraping Indium Pocket

• Removing gallium on cells / machine

Components

Cells

• Pulling a Cell (auto-plays)

• Baking Source Cells

• Replacing Al crucible

• Melting Aluminum

• Wiring in High Temp Crucible

• Removing the Bravo Nitrogen System

• Making Silicon and Beryllium

• Dual Dopant Outgassing Journal

Crucibles

• Cleaning PBN Crucibles

Shutters

• Replacing Shutter Bellows

• Replacing a Ta Shutter in a Glovebag

• Replacing a Ta In Shutter in a Glovebag Journal

• Replacing the Echo B Shutter in a Glovebag notes

• Drilling holes for externally adjustable bellows

Pumps

• Cryopumps

  • Cryopump Maintenance

  • Cryopump Cold-head Rebuild

  • Current Cryopump Status

  • Cryopump Interlock

• Scroll Pump Maintenance

  • Current Scroll Pump Specs

• Ion Pump Feedthrough Change

• Making New Exhaust Lines

Electronics

• Eurotherm Configuration

• Aluminum Interlock

• SRS Ion Gauges

Valves

• All Metal Valve Maintenance

Viewports

• Viewport Replacement

• Heated Viewport Replacement

CAR

• Pulling the CAR

• Replacing the CAR Ion Gauge

• Replacing the CAR Springs pBN

Bake Out System (BOS)

Misc

• Bolts and Gaskets

• The Treatment

• Etching

• Water Filters

• In Situ Reload

  • In-Situ Reloading Tool

• Re-tapping Flanges

• BEP QCM

• Tiger Vac

Growths

• Bravo MBE Junk Growth

  • System Bravo Junk Growth Temps

• Echo MBE Junk Growth

  • System Echo Junk Growth Temps

Maintenance Files (Need to convert these to Wiki docs -- SRB)

(

filelist "Lab-Procedures/" recursive=true sep=line:)

• Need to add to cryo rebuild: baking teflon rollers, opening/closing He supply, no mix leakcheck/compressor He, how to diagnose issues...

Miscellaneous

• • Note: Veeco (and Andy's instructions?) use thicker cable than we use without issue. However, the thicker stuff is ABSURDLY expensive.

  • Note: thermocouples have a polarity, check the convention when attaching wires to plugs! Conventions:

    • Thermocouple

• Untapping flange

• CBr4 Source