Auger System

Auger System

Auger System Procedures (As of 04/18/2014)

Venting:

  • Turn off RGA electron multiplier, then the filament, then disconnect the RGA

  • Turn off RGA

  • Turn off ion gauge

  • Turn off mini-turbo pump if on, unclamp it and remove it from the system

  • Disconnect nitrogen line from desiccator, use foil to hold in place at all metal valve opening

  • Close gate valve to isolate ion pump

  • Slowly open all metal valve (Torque spec 50)

Pumping Down:

  • Re-attach mini-turbo. Start fore pump only.

  • When pressure < 100 Torr, turn on turbo as well

  • Wait for pressure to reach 5e-4 Torr (~2 hours)

  • Close all metal valve

  • Slowly open gate valve to ion pump, watching pressure. If pressure goes too high, ion pump will shut down.

  • Turn on ion gauge and RGA

  • Leak check