Removing Nitrogen System

Written by AKR 7/14/14 from notes. Updated NTS Apr 2016.

Make sure all systems are off and valves sealed as needed.

Remove RF Box

1. Unplug power to supply and turbo pump controller.

2. Unplug power to RF box

3. Drain water to N2 cell and blow out

4. Unscrew set screw on black knob.

5. Unscrew screws used to hold case to the RF box.

   1. There are 4 screws on the knob side, 5 on top, 1 on bottom, 1 on the left side

6. Take off the case (with knob attached)

   1. Make sure no inside screws fall (like for the knob)

   2. slots on rod on inside face of RF box case line up with pins on the rod in the RF box. [?]

7. Disconnect blue water line from the water/electrical feedthrough on plasma source.

8. Remove four screws on copper clamp using a 5/64 allen (compact space is annoying).

   1. Be gentle, this connects the RF box to the chamber and is near an UV part.

   2. It is a clamp around the cell cooling water and in-vacuum feedthrough

   4. Copper top clamp will come off

9. Unscrew the bolts connecting the RF box from the source using a 7/16 wrench.

10. Remove RF box, using two people, watch for feedthroughs

Remove N2 Tower

1. Disconnect things coming off of the tower. Look at pictures on share drive for minor assistance.

   1. RHEED shutter airlines (at RHEED and dopants)

   2. Power cords and control cords

   3. Rough bellows, disconnect after viton seal on tower (toward pump side)

2. Take IR detector off viewport

3. Remove N2 lines

4. Loosen mounting bolts

5. Pull off with 1-2 people, and 1 person watching for wires, feedthroughs, connections, etc.

Notes