Cleanroom Procedures
Cleanroom Procedures
The visions described have changed a little.
I envisioned Procedures as processes for for standard things‚ e.g. Page on standard resist process (w/general process params etc), a page on metalization, a page on ___, etc. Basically stand-alone blocks that you could put together to build a process, with a bit more reasoning and process tolerances spelled out
For recipes, I envisioned run sheets for specific processes, e.g. One for GaSb lasers, one for GaAs tunnel junctions, one for Ohmic contacts, one for photodetectors, etc... More checklists for a monkey to follow, rather than some discussion about each particular process step.-SRB
Read the clean room training page if you are a new user.
Processes in Cleanroom
Processes out of Cleanroom
Deposition
PECVD - Plasmatherm #1 (note the cleaning procedure)
Plasmatherm 790 guide with recipe editing steps [1]
Wet Etching
Citric Acid Etch - For InAs, for liftoff
SiNx BOE Etch - SiNx BOE Etch, for laser
Dry Etching
RIE Plasmatherm1 - Plasmatherm #1
Plasmatherm 790 guide with recipe editing steps [2]
RIE Oxford - Oxford RIE
ICP Oxford - Oxford ICP
CHA (Evaporation)
CHA#1 User Manual (.pdf file, 11.3 MB)
Changes since procedure was written:
Xtal life now counts up.
The Status Panel/Deposition Controller is different.
In Step 15, the power increases to 25% (Soak 1) automatically. It is here that you should change the power to manual control.