Cleanroom Procedures

Cleanroom Procedures

Cleanroom Procedures

  • The visions described have changed a little.

I envisioned Procedures as processes for for standard things‚ e.g. Page on standard resist process (w/general process params etc), a page on metalization, a page on ___, etc. Basically stand-alone blocks that you could put together to build a process, with a bit more reasoning and process tolerances spelled out

For recipes, I envisioned run sheets for specific processes, e.g. One for GaSb lasers, one for GaAs tunnel junctions, one for Ohmic contacts, one for photodetectors, etc... More checklists for a monkey to follow, rather than some discussion about each particular process step.-SRB

  • Read the clean room training page if you are a new user.

Processes in Cleanroom

Processes out of Cleanroom

Deposition

Wet Etching

Dry Etching

CHA (Evaporation)

Annealing, Diffusion, Bonding

Characterization

Misc