Cleanroom Procedures
Cleanroom Procedures
The visions described have changed a little.
I envisioned Procedures as processes for for standard things‚ e.g. Page on standard resist process (w/general process params etc), a page on metalization, a page on ___, etc. Basically stand-alone blocks that you could put together to build a process, with a bit more reasoning and process tolerances spelled out
For recipes, I envisioned run sheets for specific processes, e.g. One for GaSb lasers, one for GaAs tunnel junctions, one for Ohmic contacts, one for photodetectors, etc... More checklists for a monkey to follow, rather than some discussion about each particular process step.-SRB
Read the clean room training page if you are a new user.
Processes in Cleanroom
Processes out of Cleanroom
Deposition
PECVD - Plasmatherm #1 (note the cleaning procedure)
Plasmatherm 790 guide with recipe editing steps [1]
Wet Etching
Citric Acid Etch - For InAs, for liftoff
SiNx BOE Etch - SiNx BOE Etch, for laser
Dry Etching
RIE Plasmatherm1 - Plasmatherm #1
Plasmatherm 790 guide with recipe editing steps [2]
RIE Oxford - Oxford RIE
ICP Oxford - Oxford ICP
CHA (Evaporation)
CHA#1 User Manual (.pdf file, 11.3 MB)
Changes since procedure was written:
Xtal life now counts up.
The Status Panel/Deposition Controller is different.
In Step 15, the power increases to 25% (Soak 1) automatically. It is here that you should change the power to manual control.
Annealing, Diffusion, Bonding
Characterization
Misc
Coral Troubleshooting (Coral is no longer in use, now we use Sedona)