Output/Note

Temperature [C]

Voltage [kV]

Current [A]

Note

1

50

10:52 AM, Start T and t

>1

160

10:58 AM

>1

250

11:02 AM

4.6%

460

11:12 AM; a bit fast, pause a minute; T still climbing while paused at 4.6%; BOS Pressure 6e-10 to 1.6e-8, plateaued around 375 C; While paused at 4.6%, Si continues from 460 to 515 C and still climbing slowly; BOS pressure starts to decrease

4.6%

515

11:18 AM; resume (after)

715

11:33 AM; 4.6e-8 torr; 13.3 C/min

865

11:45 AM; 13 C/min

975

11:55 AM; 2.59e-8 torr; 12.4 C/min; Be up to 133 C from Si side heat

1125 C

12:15 PM; 1.81e-8 torr and dropping; ramp rate has gone down on average, dropped a lot in last few minutes

17.1%

1127 C

12:31 PM; 1.1e-8 torr, click continue five times

18.3%

1129 C

12:36 PM; 1e-8 torr

20.2%

1130 C

12:47 PM; 8.9e-9; click continue 28 times in one minute; Stuck at 1130 C still, values ~11 V and 10.6 A

Stuck at 1130 C still, values ~11 V and 10.6 A

1130 C

11

10.6

Red current light on Si Sorenson is on meaning current limit was hit (Kyle has pic); Cancel recipe and set eurotherm back to where T flatlined

Need to adjust current max, need to find it first

1130 C

11

10.6

Lower eurotherm til we find where Sorenson toggles between V and I limited; Twiddle Sorenson knob a bit; Lower Eurotherm to see effect, confirm we found fair value; 11 V 10.6 A is max setting for normal Si cell; Turn up current max; Don't want current to go above 12 A.

Resume with increasing with slightly modified recipe (pt.2)

13.7%

1135 C

1:09 PM; 1.4e-8 torr; reached current limit again at ~14.5%; Pause recipe, keep there or lower to it[?]

Increase current knob on sorenson, let sorenson get right, let temperature rise, Resume Recipe

Oops, next step sets power back to next increment; Jumped up by 0.6%; Watch closely

15.5%

1215 C

1:20 PM; 1.7e-8 torr; Watch closely

15.9%

1235 C

13

12

1:22 PM; 1.7e-8 torr; current hit 12, Pause recipe

Check thermocouple type is correct on connection and in Eurotherm (it is, type C); Config mode resets Eurotherm - Current Spike bad!; Not sure what to do;

12 A should have cell at 1400 C not 1235 C; ramp back up to ~15.5% (pt.3)

Spec sheet is for different cell! Kyle calls Veeco for correct sheet. We can go up to ~14.4 A

Resume with increasing with modified recipe (pt.4)

Current limit hit again; Pause recipe; Increase limit; Let temperature stabilize

17.2%

1297 C

14.1

12.6

2:43 PM, Presently; 9.7e-9 torr; Resume recipe

18.5%

1355 C

15.1

13.3

2:51 PM; 1.2e-8 torr

End Recipe

Wait for BOS to rollover

Start Be recipe

1

176 (residual heating), 50 C on its own

0.3

0.8

3:05 PM; 1e-8 torr

4.7

476

3.4

4.9

3:20 PM; 1.95e-8

6.8

676

5.1

6.4

3:29 PM; 2.1e-8 torr; 22.2 C/min; Pause because ramp rate is a bit high;

6.9

709

3:36 PM; 1.64e-8 torr; Resume recipe

10.4

939

8

8.8

3:51 PM; 3.2e-8 torr; 15.3 C/min

13.2

1099

10.3

10.3

4:03 PM; 2.7e-8 torr; 14 C/min; Si at 18.5%, 1352 C;

10.6

10.4

Caught the Be at current limit

13.8

1124

10.6

10.4

4:06 PM; 2.3e-8 torr; lower Be Eurotherm output

Need to adjust current max, need to find it first

13.5% is V control, 13.6% is I (A) limited; Go to 13.5% and increase current knob

Adjust Current knob

Increase to 13.6% then 13.7% then 13.8%, wait 10 seconds between each bump; This is where recipe left off; Wait for temperature to level off

13.8

1140

10.8

10.6

4:16 PM; 1.7e-8 torr; Wait for temperature to level off then Resume recipe

17.9

1333 C

14.2

12.7

4:33 PM; 2.4e-8 torr

18.2

1350

18.2

1354

14.4

12.9

4:35 PM; 2.3e-8 torr

End (Cancel) Recipe

Be ramped up faster than Si

Modify Cooldown recipe; End them at 0.5%

4:54 PM; 1.72e-8 torr; Start recipe; Starts off smoothly, goes well (a bit fast), done;