Wafer Tracking
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Wafer Tracking
We have a lot of wafer types. Not all are tracked. Many are tracked on the Wafer Sheets (dry-erase). Fewer (but all main ones) are tracked on the online Wafer Log.
Wafer Inventory
A wafer inventory/recount should be performed every 6 months by two people. This is an event on the LASE calendar.
Count up all the physical wafers in all of the MBE lab desiccators. Count partial wafers in the loading desiccator as well.
For the same type (e.g. SI GaAs) note different manufacturers, thickness, etc.
Different sub-types should be noted separately on the Wafer Sheets, but can be combined on the Wafer Log.
SI GaAs 3" 625 um from AXT and SI GaAs 3" 625 um and 600 um from WaferTech would be three Sheet entries (ideally, if room) but be combined for the Log.
This inventory number should be close to the number on the online Wafer Log and the remaining number on the Wafer Sheets.
Once counted, the Sheet and Log both need to be updated. Initial and date the Sheet when done, as well as Reconcile the Wafer Log.
The desiccators are divided by material type (as much as possible) into GaAs, GaSb, and InP desiccators.
Growers should periodically check on their stock of wafers.
Not tracked
Dummy wafers donated from companies
Cleaved up random materials like glass or sapphire squares
Table of Dummy Wafers
Not guaranteed to be fully accurate
Quantity was updated on 20170221
Item | Supplier | Part Number | Notes |
|---|---|---|---|
Table of Dummy Wafers |
|
|
|
SI GaAs 2" | WaferTech | WV7162/Un | Over 15 y/o, treat as Mech, SSP, 500 um, x10 |
n (Si) GaAs 2" | WaferTech | WV8095/Si | Over 15 y/o, treat as Mech, SSP, 500 um, x15 |
SI GaAs 3" | AXT | KN302 | 20060403, x18 |
SI GaAs 3" | AXT | KQ798 | 20061225, Mech?, x14 |
p (Zn) GaAs 2" | AXT | Job 011496, Ingot G0572007200 | 19981217, x23 |
n+ (Si) GaAs 2" | AXT | Job 6595-2, Ingot G057S084402 | 19970430, x16 |
n+ (Si) GaAs 2" | AXT | Job 6595-2, Ingot G057S085902 | 19970430, 2 degrees Ntrpl(?), x24 |
SI GaAs 3" | AXT | KN456, Job 029347 | 20060417, pocket filler only (?), x10 |
SI GaAs 3" | AXT | KI942, KH306, KI988, Job 026020 | 20040406 or 20040408, SI Mech 2 degrees, x6 |
n (Si) GaAs 3" | WaferTech | WV10824/Si | SSP, 625 um, x40 |
p (Zn) GaSb 2" |
|
| 20000820, x35 |
n+ GaSb 2" | IntelliEpi | G402009 (170) | 20140224, x8 |
n (Te) GaSb 2" | WaferTech | R5/GS/623/Te, Order WT 18472 | 20140221, DSP, 500 um, x8 |
N/P Si 2" | iWS | SO# 16274 | 20131227, 1307-2676 x50, 1305-2539 x25, XSP, 279 um, x75 |
N/P ? 2" | iWS | SO# 16167, 02212 | 20130710, XSP, 250-300 um, x25 |
n+ (Si) GaAs 2" | AXT | SR074, Job 036879 | 20091012, x24 |
n+ (Si) GaAs 2" | AXT | SR167, Job 036954 | 20091120, x24 |
n+ (S) InP 2" | Acrotec | Lot 201144PSU | 20010830, SSP, 350 um (360 um), (100) 2 degrees off tn <110>, x20 |
n or n+ InP 2" | Acrotec | Lot B5052PSU | (100) 2 degrees -> <110>, x2 |
Tracked on dry-erase
Updated 20170221
Item | Supplier | Part Number | Notes |
|---|---|---|---|
Table of Tracked Wafers |
|
|
|
SI GaAs 3" DSP | AXT |
|
|
n (Si) GaAs 3" |
|
|
|
p GaAs 3" |
|
|
|
n (Si) GaAs 3" |
|
| (100) 2 degrees -> (110) |
n (Si) GaAs 3" |
|
| (100) 2 degrees -> (111)A |
n (Si) GaAs 3" |
|
| (100) 2 degrees -> (1-10) |
n (Si) GaAs 3" |
|
| (100) 2 degrees -> (111)B |
n (S) InAs 2" DSP (100) |
|
| MIT:LL project |
p- (Zn) InAs 2" SSP (100) |
|
| MIT:LL project |
SI GaAs 3" SSP | WaferTech |
| Front des. |
SI (Fe) InP 2" DSP | WaferTech |
|
|
SI (Fe) InP 2" DSP | InPact |
| Front Des. |
UID (p) GaSb 2" DSP | WaferTech |
|
|
n (Te) GaSb 2" DSP | WaferTech |
|
|
n (S) InAs 2" DSP |
|
|
|
UID (n) InSb 2" DSP |
|
|
|
p (Zn) InAs 2" DSP | WaferTech |
| UVA collab, Front Des. |
SI (Fe) InP 2" DSP | WaferTech |
| 500 um?, Front Des. |
n (S) InP 2" DSP | WaferTech |
| 500um, Front Des. |
n (S) InP 2" DSP | WaferTech |
| 350 um |
n (S) InP 2" DSP |
|
| (100) 0.2 degrees -> (110) |
n (S) InP 2" DS Mech |
|
| (100) 0.2 degrees -> (110), Mech |
n (S) InP 2" Mech |
|
| (100) 0.2 degrees -> (110), Mech |
p InP 3" |
|
| Jack Lee collab |
p Si 3" (100) |
|
| Backing |
Sapphire 3" SSP |
|
| Backing |
Si 4" SSP |
|
|
|
Si backing wafers (?) |
|
| ??? |
Si 3" (111) |
|
|
|
p Si 3" (111) |
|
| 350 um |
Al2O3 quarter pieces |
|
| Not counted, just listed (move to above section?) |
Tracked on Database
Updated 20170221
Substrate Wafer Size
nGaAs 3-inch
nGaSb 2-inch
nInAs 2-inch
nInP 2-inch
pGaAs 2-inch
pInAs 2-inch
Si100 3-inch (tracking soon)
Si111 3-inch (tracking soon)
SIGaAs 3-inch
SIInP 2-inch
UIDGaSb 2-inch
Need to add sapphire