Cleanroom Training
How to get it done QFH
NTS, 04/08/2013, 09/10/2015
Identifying the tool
First you need to figure out what tool type your process requires. Searching a textbook and the literature can help, as can asking group members or other cleanroom users (users).
Keep tool type in mind, e.g. if you find that someone used ALD from Company A to do what you want to, there’s a pretty good chance we don’t have that exact model (or even one from that company). But we probably have that tool type.
Perhaps we don’t have that tool type, but we probably have a tool type that can do what you want.
[Note: Results from the literature are not absolute. Look for papers that have processing trends vs. parameters, or multiple rates vs. a parameter. Just because author B got rates X, Y, Z with his tool, it doesn’t mean you’ll get the same rates. But trends should generally hold.]
Look on the MRC website to see what tools are available.
There is also data posted concerning what the tool is equipped with, e.g. what gases are available for each chamber for Plasmatherm #1.
The posted material compatibility guidelines are not trustworthy.
If you are not sure what tool is suitable for your needs, talk to Ricardo or Johnny.
Requesting Training
Read the sections on Tool Training and Reservations on the MRC website (http://www.mrc.utexas.edu/content/training).
N/A right now, no trainer calendars: Check Sedona to see if a training session that is convenient for you is already scheduled on the tool. Then if there are slots open you can just email Ricardo or Johnny, or call Johnny, and ask to join in.
Email trainers to get the training, if nothing is on Sedona. Always email at least two addresses.
Rico, Johnny, Samuel, and Maria do almost all of the training (Rachel does IPC only).
mertrain@mer.utexas.edu (email this for disbursement to trainers)
ricardo@mer.utexas.edu (include him on mertrain list emails)
sietkind@utexas.edu (can email directly, I’d still include either mertrain or another trainer)
nietom18@utexas.edu (can email directly, I’d still include either mertrain or another trainer)
rachel@mer.utexas.edu (ICP training only, in the evenings)
marylene@mer.utexas.edu (include on training emails as needed for REUs, getting responses, etc.)
Do not ask for training the same day unless it’s super critical. Expect a no anyway.
Asking for next day training is questionable.
Asking for day after next training is normal, although 48 hours is suggested.
I’ve asked Monday afternoon for Wednesday morning training and gotten it.
N/A right now, no trainer calendars: Check Sedona to see when the trainers have time. It’s not very productive to ask for training when they are busy with something else and you could’ve known by checking Sedona.
I try to keep it as open as possible, but not super vague.
Ex: Do you have time after 12pm this Wednesday or Friday?
Not: I only have 10:45am on Wednesday, OK?
Not: Can I be trained sometime this month? This would probably work but is not efficient.
The length of training varies by tool. I think 2.5 hours is the longest I’ve had (on the CHA but I went slow). Keep at least an hour for it, two hours is pretty safe. I think if it’s supposed to be more than two hours, the trainer will mention it, or you might be sent to another trainer.
ICP training is done by Rachel, who has a different full-time job, so it occurs after 4 or 5 PM on weekdays.
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Ricardo works from 7 or 8 am to 4 or 5 pm, and takes lunch at noon.
Johnny works from 2pm to sometime after 7 pm, I actually don’t know.
Rachel (ICP training) is contacted by email for evening ICP training.
You can email Ricardo. He is pretty good about getting back to you. No need to schedule on his non-existent Sedona calendar. His email is Ricardo I think.
You can email Johnny, N/A right now: but you must also request time on his training calendar using the non-existent Sedona training account. His email is mertrain I think.
user: training; password: training
N/A: You can request time on Johnny’s coral calendar as above, and try calling him.
Ricardo will usually help you set up a time with him if your time frame was too vague for him, or too far in the future.
Ricardo will email you a picture of a scheduled training session if he liked a time you offered.
After Ricardo emails me, I usually send a ‘looking forward to it’ email where I repeat the time and date he scheduled.
Let trainers know of any new scheduling conflicts or last minute conflicts ASAP.
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Most tools have training and certification during the same session.
Some tools (CHA1, SEM) have training sessions and then one or two certification sessions.
Be clear that you are scheduling a certification session, and what type if multiple, if you have already done training.
I did the first SEM certification session twice. My email was clear, and I recall coral being correct, but a mistake was made. Not huge deal for SEM, but take heed.
Training/Certification
Now that you have a time and date set with the trainer, it’s time to train!
But first, read the posted SOP available on the MRC website. Some of these are linked to from our Wiki.
Read our wiki to see if there are relevant procedures or tips.
The SOPs on our wiki tend to be much better than the MRC ones.
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Show up for training on time, or a minute early.
There’s no need to show up too early.
Do not show up for training late.
The trainer might be late or finishing up something he is doing; be patient.
If Rico is running late, he’ll usually stop by and tell you he’ll be a few minutes.
If Johnny is more than 10 minutes late, give him a call.
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Training typically consists of the trainer going over everything (not quite, but yeah…), and then certifying you right after.
Certification is typically either a quick dummy run, or just going through the motions to use the tool (without a sample).
You are not allowed to use written notes or SOPs during certification.
Some certifications allow you to bring a sample to actually work on (in theory), but the only one I know this can happen for is CHA1 (evaporation).
I have never brought a sample to certification.
Ask your questions during training. Ideally ask them often and as the trainer goes. If you missed something, ask what he did, where he clicked, etc.
For acid hood training, this is slightly different when working with real acid, because you’re not supposed to ask questions at the hood (based on not distracting a user using acid).
I almost always have a question at the end, and usually get grief for it, but I get an answer.
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Training can give you a lot of information quickly. It is up to you whether or not you take notes or listen intently.
Notes are not necessary because you can print an SOP for normal usage, but I like turning my notes into an improved SOP. And writing helps me remember things.
Rico talks faster than Johnny, so it’s harder to take notes with him.
I’ve usually managed to take notes, but I usually miss one or two things I have to figure out quickly during the certification.
Pay attention to any emphasized points; the trainer may quiz you later.
Remember everything.
When looking at software, remember/note where the trainer clicks (and if it’s left or right click).
Not seeing which menu an option is under is my most common missed point.
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Certification will typically be shorter than training, if done in the same session (majority of tools).
The trainer will have you do the same or a similar process as what they did, but typically change a thing or two.
The operation of the tool will nominally be the same.
You cannot use notes.
You should be able to go through the procedure with minimal prodding.
If I get stuck, I’ll say what I will do next before doing it, and see the trainer’s reaction.
I’ve asked questions during certification. This is frowned upon, but I needed to ask where something was to have any chance of passing. I ended up passing, barely.
When you complete the certification, you will sign a form and get LabAccess typically within a few hours.
You might not get Sedona access for a couple days.
If you do not pass certification, I’d think you have to schedule another training/certification or certification session.
Reserving Tools
You reserve tools using Sedona.
You log into tools using LabAccess.
LabAccess limits your time. Always make sure you have enough time in LabAccess to complete your process.
Sedona and LabAccess might be connected, but for data not use. You can have no Sedona reservation and still use a tool with LabAccess, and you can have a Sedona reservation but if you show up more than 30 minutes late, another user can take your reservation and login on LabAccess.
I’d suggest using the same username and password for both, so you don’t get too confused logging into both.
Rules for making Sedona reservations are on the MRC website.
Always log into and log out of LabAccess.
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There are limits for how much time you can reserve on a tool per day and per two day period.
Remember this is per tool, not for all tools.
Asking Rico nicely, and with good reason, may let you get more time. You have to know when you want it. He will schedule it under training or his account. Always thank him after.
Primetime seems to vary by tool, and is different on the weekends.
If you need a tool for a long time, don’t make hour reservations with half hour gaps between. Ask Rico for allowing an extra long slot.
You can only sign up for tools 48 hours in advance. These 48 hours apply to the start time of the slot.
You can sign up for CHA at 3pm on Monday for 1-3pm on Wednesday.
You can sign up for CHA at 3pm on Monday for 3-5pm on Wednesday.
You cannot sign up for CHA at 3pm on Monday for 5:30pm on Wednesday.
It is better to grab a slot you might need and cancel soon (or the next day, or right before even), then potentially miss out on a day of processing.
Don’t make a habit of taking a slot and then canceling.
Don’t make a habit of taking as many slots as possible and then canceling most. Never do this.
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Some tools have mailing lists you have to use when you cancel a slot (or are hunting to get a released one).
If you cancel your slot more than 36 or 40 hours before your reservation, you should but don’t need to send an email (this is an opinion, not a rule).
If you cancel your slot more than 4 hours before the reservation (and less than 36 or 40 hours), definitely send an email. A reason for canceling is suggested. An apology is optional.
If you cancel your slot less than 4 hours before your reservation, definitely send an email, with an apology and reason.
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There’s a rule that you can use a tool without a reservation, if it’s not scheduled on Sedona by anyone else, and you won’t inconvenience the next user. Be cautious with this. If no one is scheduled all day, so you go in without making a reservation and start dominating the tool, then someone makes a reservation for a time before you will be finished, you might frustrate that user. If you can spare the reservation time, always make a reservation. If you’re tight on scheduling time, perhaps just schedule the last half or part of your usage, in the hopes people will wait til you’re done, and not schedule in front of you. If someone else does schedule in conflict with a long usage, try to email/contact them to let them know when you’ll be done. You can ask Ricardo to extend your allowed reservation time, or something, to help you get your processing done.
Fin
Typically LabAccess controls power to tools, not the pumps. E.g. RF power, E-beam gun, circuit breaker. Do not have LabAccess log you out in the middle of a run. Do not need to disable and re-enable a tool in the middle of a run because you can’t complete the run with the time remaining.
Things happen, but always keep your cool and think of solutions. Not everything is in your control, but plan ahead and have as much control as possible over your processing.